Halocarbons 2316 / Hexafluorobutadiene
Application
Halocarbon 2316 (C4F6) is mainly used for DRAM and Semiconductor industry for high aspect ration etching.
Product Specification
Purity 99.99%
Other Fluorocarbons < 400
N2+O2+Ar <50
CO2 <20
H2O <5 ppmw
Acidity (as HF) <5 ppmw
*Unit: ppm
https://tgcrocgroup.tw66.com.tw/web/NMD?postId=1302383【新竹縣-峨眉鄉】連續壁-預壘樁-全套管-地質改良
【新竹縣-峨眉鄉】土地開發 / 委建合建 / 都市更新 / 危老重建 / 不動產整合 / 建築規劃
