Halocarbons 2316 / Hexafluorobutadiene
Application
Halocarbon 2316 (C4F6) is mainly used for DRAM and Semiconductor industry for high aspect ration etching.
Product Specification
Purity 99.99%
Other Fluorocarbons < 400
N2+O2+Ar <50
CO2 <20
H2O <5 ppmw
Acidity (as HF) <5 ppmw
*Unit: ppm
#CVD#Hexafluorobu#aspect#etch#high#ratio#六氟丁二烯#蝕刻
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